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词汇 Antenna effect
分类 英语词汇 英语翻译词典
释义

Antenna effect

英语百科

Antenna effect

Figure 1: Illustration of the cause of antenna effect. M1 and M2 are the first two metal interconnect layers.
Figure 2.  Diagram of a MOSFET, showing source/drain implant and gate dielectric.
Figure 3: Illustration of three possible fixes to an antenna violation.

The antenna effect, more formally plasma induced gate oxide damage, is an effect that can potentially cause yield and reliability problems during the manufacture of MOS integrated circuits. Fabs normally supply antenna rules, which are rules that must be obeyed to avoid this problem. A violation of such rules is called an antenna violation. The word antenna is something of a misnomer in this contextthe problem is really the collection of charge, not the normal meaning of antenna, which is a device for converting electromagnetic fields to/from electrical currents. Occasionally the phrase antenna effect is used in this context, but this is less common since there are many effects, and the phrase does not make clear which is meant.

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